Comparison of magnetron sputtering discharge characteristics operating in DC and RF modes a PIC/MCC simulation study
Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
AVS 67th International Symposium & Exhibition (AVS) (2021)
Electron heating transition in direct current magnetron sputtering discharges
Bocong Zheng*, Yangyang Fu, Huihui Wang, Keliang Wang, Thomas Schuelke, Qi Hua Fan
The 74th Annual Gaseous Electronics Conference (GEC) (2021)
Similarity of breathing oscillations in magnetron discharges
Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
The 48th IEEE International Conference on Plasma Science (ICOPS) (2021)
One-dimensional PIC/MCC simulation of HiPIMS discharges
Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
64th Annual SVC Technical Conference (SVC) (2021)
Kinetic investigation of electron energization in magnetron discharges RFMS, DCMS, and HiPIMS
Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
Plasma Processing and Technology International Conference (Plasma Tech 2021) (2021)
Electron dynamics in magnetron sputtering discharges
Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
The 8th International Conference on Microelectronics and Plasma Technology (2021)
Similarity Laws for Low-Temperature Plasmas from Continuum to Kinetic Regimes
Yangyang Fu*, Bocong Zheng, Peng Zhang, Qi Hua Fan, and John P. Verboncoeur
The 8th International Conference on Microelectronics and Plasma Technology (2021)
High-energy ballistic electrons in low-pressure radio-frequency plasmas
Yangyang Fu*, Bocong Zheng, De-Qi Wen, Peng Zhang, Qi Hua Fan, John P Verboncoeur
The 73rd Annual Gaseous Electronics Conference (GEC) (2020)
Similarity of Radio-Frequency Discharges in Nonlocal Regimes
Yangyang Fu*, Bocong Zheng, Peng Zhang, Qi Hua Fan, John P Verboncoeur, Xinxin Wang
The 73rd Annual Gaseous Electronics Conference (GEC) (2020)
Similarity of low-pressure radiofrequency discharges
Yangyang Fu*, Bocong Zheng, Peng Zhang, John P Verboncoeur
The 47th IEEE International Conference on Plasma Science (ICOPS) (2020)
Electron heating in magnetized capacitively coupled discharges
Bocong Zheng*, Thomas Schuelke, Qi Hua Fan
The 72st Annual Gaseous Electronics Conference (GEC) (2019)
On the similarities of high pressure microdischarges
Yangyang Fu*, Bocong Zheng, Janez Krek, Deqi Wen, Peng Zhang, John P Verboncoeur
The 72st Annual Gaseous Electronics Conference (GEC) (2019)
Effect of surface charge accumulation on ion current distribution in radio-frequency magnetron discharges
Bocong Zheng*, Keliang Wang, Thomas Schuelke, Qi Hua Fan
AVS 66th International Symposium & Exhibition (2019)
Plasma modulation in a high-intensity acoustic standing wave field
Bocong Zheng*, Thomas Schuelke, Qi Hua Fan
The 71st Annual Gaseous Electronics Conference (GEC) (2018)
Modeling chemical reactions in contact glow discharge electrolysis
Bocong Zheng*, Maheshwar Shrestha, Keliang Wang, Thomas Schuelke, Qi Hua Fan
AVS 65th International Symposium & Exhibition (2018)
Magnetically enhanced inductive plasmas generated by symmetrical solenoid coils
Bocong Zheng*, Maheshwar Shrestha, Qi Hua Fan
AVS 64th International Symposium & Exhibition (2017)