Talks

Conference Abstracts

  • Comparison of magnetron sputtering discharge characteristics operating in DC and RF modes a PIC/MCC simulation study
    Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    AVS 67th International Symposium & Exhibition (AVS) (2021)

  • Electron heating transition in direct current magnetron sputtering discharges
    Bocong Zheng*, Yangyang Fu, Huihui Wang, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    The 74th Annual Gaseous Electronics Conference (GEC) (2021)

  • Similarity of breathing oscillations in magnetron discharges
    Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    The 48th IEEE International Conference on Plasma Science (ICOPS) (2021)

  • One-dimensional PIC/MCC simulation of HiPIMS discharges
    Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    64th Annual SVC Technical Conference (SVC) (2021)

  • Kinetic investigation of electron energization in magnetron discharges RFMS, DCMS, and HiPIMS
    Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    Plasma Processing and Technology International Conference (Plasma Tech 2021) (2021)

  • Electron dynamics in magnetron sputtering discharges
    Bocong Zheng*, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    The 8th International Conference on Microelectronics and Plasma Technology (2021)

  • Similarity Laws for Low-Temperature Plasmas from Continuum to Kinetic Regimes
    Yangyang Fu*, Bocong Zheng, Peng Zhang, Qi Hua Fan, and John P. Verboncoeur
    The 8th International Conference on Microelectronics and Plasma Technology (2021)

  • High-energy ballistic electrons in low-pressure radio-frequency plasmas
    Yangyang Fu*, Bocong Zheng, De-Qi Wen, Peng Zhang, Qi Hua Fan, John P Verboncoeur
    The 73rd Annual Gaseous Electronics Conference (GEC) (2020)

  • Similarity of Radio-Frequency Discharges in Nonlocal Regimes
    Yangyang Fu*, Bocong Zheng, Peng Zhang, Qi Hua Fan, John P Verboncoeur, Xinxin Wang
    The 73rd Annual Gaseous Electronics Conference (GEC) (2020)

  • Similarity of low-pressure radiofrequency discharges
    Yangyang Fu*, Bocong Zheng, Peng Zhang, John P Verboncoeur
    The 47th IEEE International Conference on Plasma Science (ICOPS) (2020)

  • Electron heating in magnetized capacitively coupled discharges
    Bocong Zheng*, Thomas Schuelke, Qi Hua Fan
    The 72st Annual Gaseous Electronics Conference (GEC) (2019)

  • On the similarities of high pressure microdischarges
    Yangyang Fu*, Bocong Zheng, Janez Krek, Deqi Wen, Peng Zhang, John P Verboncoeur
    The 72st Annual Gaseous Electronics Conference (GEC) (2019)

  • Effect of surface charge accumulation on ion current distribution in radio-frequency magnetron discharges
    Bocong Zheng*, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    AVS 66th International Symposium & Exhibition (2019)

  • Plasma modulation in a high-intensity acoustic standing wave field
    Bocong Zheng*, Thomas Schuelke, Qi Hua Fan
    The 71st Annual Gaseous Electronics Conference (GEC) (2018)

  • Modeling chemical reactions in contact glow discharge electrolysis
    Bocong Zheng*, Maheshwar Shrestha, Keliang Wang, Thomas Schuelke, Qi Hua Fan
    AVS 65th International Symposium & Exhibition (2018)

  • Magnetically enhanced inductive plasmas generated by symmetrical solenoid coils
    Bocong Zheng*, Maheshwar Shrestha, Qi Hua Fan
    AVS 64th International Symposium & Exhibition (2017)

Invited Talks and Seminars

  • Bocong Zheng†, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan, Electron power absorption in magnetron sputtering discharges, The 75th Annual Gaseous Electronics Conference (GEC), October 3–7, 2022.
  • Bocong Zheng†, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan, Kinetic investigation of electron heating in HiPIMS discharges, 48th International Conference On Metallurgical Coatings & Thin Films (ICMCTF), March 22–27, 2022.
  • Bocong Zheng†, Yangyang Fu, Keliang Wang, Thomas Schuelke, Qi Hua Fan, Electron dynamics in radio frequency magnetron argon discharges, International Online Plasma Seminar (IOPS, Online Virtual), August 5, 2021. (Invited Tutorial/Review, 1 hour, PDF, Video recording)