@article{zheng21_elect_dynam_radio_frequen_magnet,
  author =       {Bocong Zheng and Yangyang Fu and Keliang Wang and Thomas
                  Schuelke and Qi Hua Fan},
  title =        {Electron Dynamics in Radio Frequency Magnetron Sputtering
                  Argon Discharges With a Dielectric Target},
  journal =      {Plasma Sources Science and Technology},
  volume =       30,
  number =       3,
  pages =        035019,
  year =         2021,
  doi =          {10.1088/1361-6595/abe9f9},
  url =          {https://doi.org/10.1088/1361-6595/abe9f9},
}