@article{zheng21_compa_1d_2d, author = {Bocong Zheng and Yangyang Fu and Keliang Wang and Thanh Tran and Thomas Schuelke and Qi Hua Fan}, title = {Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges}, journal = {Physics of Plasmas}, volume = 28, number = {nil}, pages = 014504, year = 2021, doi = {10.1063/5.0029353}, url = {https://doi.org/10.1063/5.0029353}, }