@article{zheng19_reduc_capac_coupl_induc_coupl,
  author =       {Bocong Zheng and Maheshwar Shrestha and Keliang Wang and
                  Thomas Schuelke and Evgeny Shun'ko and Veniamin Belkin and Qi
                  Hua Fan},
  title =        {Reduction of Capacitive Coupling in Inductively Coupled
                  Plasmas By Solenoid Coils on Dielectric Window},
  journal =      {Journal of Applied Physics},
  volume =       126,
  number =       12,
  pages =        123302,
  year =         2019,
  doi =          {10.1063/1.5116585},
  url =          {https://doi.org/10.1063/1.5116585},
}