@article{zheng19_disch_depos_charac_high_power,
  author =       {Bocong Zheng and Zhongzhen Wu and Suihan Cui and Shu Xiao and
                  Liangliang Liu and Hai Lin and Ricky K. Y. Fu and Xiubo Tian
                  and Feng Pan and Paul K. Chu},
  title =        {Discharge and Deposition Characteristics of High-Power Impulse
                  Magnetron Sputtering Using Various Target Materials},
  journal =      {IEEE Transactions on Plasma Science},
  volume =       47,
  number =       1,
  pages =        {193-198},
  year =         2019,
  doi =          {10.1109/tps.2018.2884475},
  url =          {https://doi.org/10.1109/tps.2018.2884475},
}