@article{zheng18_acous_stand_wave_modul_capac_coupl_plasm,
  author =       {Bocong Zheng and Thomas Schuelke and Qi Hua Fan},
  title =        {Acoustic Standing Wave Modulation of Capacitively Coupled
                  Plasmas},
  journal =      {Journal of Physics D: Applied Physics},
  volume =       51,
  number =       28,
  pages =        285201,
  year =         2018,
  doi =          {10.1088/1361-6463/aaca64},
  url =          {https://doi.org/10.1088/1361-6463/aaca64},
}