@article{zheng17_global_plasm_model_react_depos,
  author =       {B. C. Zheng and Z. L. Wu and B. Wu and Y. G. Li and M. K. Lei},
  title =        {A Global Plasma Model for Reactive Deposition of Compound
                  Films By Modulated Pulsed Power Magnetron Sputtering
                  Discharges},
  journal =      {Journal of Applied Physics},
  volume =       121,
  number =       17,
  pages =        171901,
  year =         2017,
  doi =          {10.1063/1.4977471},
  url =          {https://doi.org/10.1063/1.4977471},
}