@article{zheng15_press_effec_energ_depos_cu,
  author =       {B. C. Zheng and D. Meng and H. L. Che and M. K. Lei},
  title =        {On the Pressure Effect in Energetic Deposition of Cu Thin
                  Films By Modulated Pulsed Power Magnetron Sputtering: A Global
                  Plasma Model and Experiments},
  journal =      {Journal of Applied Physics},
  volume =       117,
  number =       20,
  pages =        203302,
  year =         2015,
  doi =          {10.1063/1.4921443},
  url =          {https://doi.org/10.1063/1.4921443},
}