@article{zheng15_nonun_plasm_diffus_multi_pulse,
  author =       {B.C. Zheng and M.K. Lei},
  title =        {Nonuniform Plasma Diffusion and Multi-Pulse Effect in
                  Plasma-Based Ion Implantation},
  journal =      {Nuclear Instruments and Methods in Physics Research Section B:
                  Beam Interactions with Materials and Atoms},
  volume =       343,
  number =       {nil},
  pages =        {83-88},
  year =         2015,
  doi =          {10.1016/j.nimb.2014.11.025},
  url =          {https://doi.org/10.1016/j.nimb.2014.11.025},
}