@article{zheng15_nitrog_mass_trans_model_plasm,
  author =       {Bocong Zheng and Kesheng Wang and Zhipeng Zhang and Honglong
                  Che and Mingkai Lei},
  title =        {Nitrogen Mass Transfer Models for Plasma-Based Low-Energy Ion
                  Implantation},
  journal =      {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces,
                  and Films},
  volume =       33,
  number =       2,
  pages =        021311,
  year =         2015,
  doi =          {10.1116/1.4907713},
  url =          {https://doi.org/10.1116/1.4907713},
}