@article{fu20_simil_law_frequen_scalin_low,
  author =       {Yangyang Fu and Bocong Zheng and De-Qi Wen and Peng Zhang and
                  Qi Hua Fan and John P. Verboncoeur},
  title =        {Similarity Law and Frequency Scaling in Low-Pressure
                  Capacitive Radio Frequency Plasmas},
  journal =      {Applied Physics Letters},
  volume =       117,
  number =       20,
  pages =        204101,
  year =         2020,
  doi =          {10.1063/5.0029518},
  url =          {https://doi.org/10.1063/5.0029518},
}