@article{chen19_micros_therm_conduc_ti_al,
  author =       {H. Chen and B.C. Zheng and Y.X. Ou and M.K. Lei},
  title =        {Microstructure and Thermal Conductivity of Ti-Al-Si-N
                  Nanocomposite Coatings Deposited By Modulated Pulsed Power
                  Magnetron Sputtering},
  journal =      {Thin Solid Films},
  volume =       {693},
  number =       {nil},
  pages =        137680,
  year =         2019,
  doi =          {10.1016/j.tsf.2019.137680},
  url =          {https://doi.org/10.1016/j.tsf.2019.137680},
}