@article{chen19_flexib_hard_tials_nanoc_coatin, author = {H. Chen and B.C. Zheng and Y.G. Li and Z.L. Wu and M.K. Lei}, title = {Flexible Hard Tialsin Nanocomposite Coatings Deposited By Modulated Pulsed Power Magnetron Sputtering With Controllable Peak Power}, journal = {Thin Solid Films}, volume = 669, number = {nil}, pages = {377-386}, year = 2019, doi = {10.1016/j.tsf.2018.10.031}, url = {https://doi.org/10.1016/j.tsf.2018.10.031}, }