@article{XiaoShu2016,
author = {Xiao, Shu and Wu, Zhong-Zhen and Cui, Sui-Han and Liu, Liang-Liang and Zheng, Bo-Cong and Lin, Hai and Ricky K Y Fu and Tian, Xiu-Bo and Pan, Feng and Paul K Chu},
title = {Cylindric high power impulse magnetron sputtering source and its discharge characteristics},
publisher = {Acta Physica Sinica},
year = {2016},
journal = {Acta Physica Sinica},
volume = {65},
number = {18},
eid = {185202},
numpages = {},
pages = {185202},
keywords = {<p>high power impulse magnetron sputtering|cylindric sputtering source|simulation|discharge characteristics</p>},
url = {http://wulixb.iphy.ac.cn/EN/abstract/article_68487.shtml},
doi = {10.7498/aps.65.185202}
}