@article{CuiSuiHan2017, author = {Cui, Sui-Han and Wu, Zhong-Zhen and Xiao, Shu and Liu, Liang-Liang and Zheng, Bo-Cong and Lin, Hai and Ricky K Y Fu and Tian, Xiu-Bo and Chu, Paul K and Tan, Wen-Chang and Pan, Feng}, title = {Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source}, publisher = {Acta Physica Sinica}, year = {2017}, journal = {Acta Physica Sinica}, volume = {66}, number = {9}, eid = {95203}, numpages = {0}, pages = {95203}, keywords = {

high power impulse magnetron sputtering;discharge in cylindrical source;electron blocking plate;magnetic field compensation

}, url = {http://wulixb.iphy.ac.cn/EN/abstract/article_70006.shtml}, doi = {10.7498/aps.66.095203} }